Study on Barium Strontium Titanate thin film gas sensors
碩士 === 國立雲林科技大學 === 電子與資訊工程研究所碩士班 === 90 === In this thesis, the solution of the ferroelectric materials, Barium Strontium Titanate(BaxSr1-xTiO3, BST) were prepared and deposited on SiO2/p-Si(100) substrate as the sensing layer of gas sensor by using sol-gel spin coating technique. In order to incre...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2002
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| Online Access: | http://ndltd.ncl.edu.tw/handle/63197803170200803187 |