Study on Porous Ultra Low Dielectric Constant Material
碩士 === 國立雲林科技大學 === 電子與資訊工程研究所碩士班 === 90 === For deep submicron generation, performance of devices is dominated by propagation delay between metal interconnection. In order to improve this issue , in this thesis, a porous material with ultra low dielectric constant is used to reduced capa...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2002
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| Online Access: | http://ndltd.ncl.edu.tw/handle/42776881244685936298 |