ArF準分子雷射加工NBK7光學玻璃之特性及最適化研究
碩士 === 國防大學中正理工學院 === 兵器系統工程研究所 === 91 === The grooving of slot on the optical NBK7 glass surface by using 193 nm ArF excimer laser and the process-parameter optimization have been studied in this research. The Taguchi analysis methodology is also applied during manufacturing process to c...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2003
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Online Access: | http://ndltd.ncl.edu.tw/handle/38374972956174143615 |