ArF準分子雷射加工NBK7光學玻璃之特性及最適化研究

• Main Authors: Yen Jyh-Chyang, 顏至強
• Other Authors: 劉道恕
• Format: Others
• Language: zh-TW
• Published: 2003
• Online Access: http://ndltd.ncl.edu.tw/handle/38374972956174143615

碩士 === 國防大學中正理工學院 === 兵器系統工程研究所 === 91 === The grooving of slot on the optical NBK7 glass surface by using 193 nm ArF excimer laser and the process-parameter optimization have been studied in this research. The Taguchi analysis methodology is also applied during manufacturing process to condense the diversity of correlated parameters and to obtain the optimization processing parameters from least experiment sets. The processing parameters for ArF excimer laser machining are average laser power, repetition rate, ablation time, focusing depth, and thickness of protective coating. The influence of these parameters on the width and depth of the slot has been investigated. The results showed that the optimum set of process parameters for producing the unitary quality of the product can be obtained by using the ANOVA analysis. It also showed that the slot with standard shape and size on the NBK7 glass can be made by using the high energy (2.36J/cm2) and low repetition rate (2Hz) laser. The thickness of protective silver coating on the NBK7 glass was found to has little influence on the slot quality, while the defocusing process tends to make incorrect shapes of the slots. The optimization processing parameters are A3B3C1D2E3（5.2μm, 2.36J/cm2, 2Hz, 0μm, 90sec）