ArF準分子雷射加工NBK7光學玻璃之特性及最適化研究

碩士 === 國防大學中正理工學院 === 兵器系統工程研究所 === 91 === The grooving of slot on the optical NBK7 glass surface by using 193 nm ArF excimer laser and the process-parameter optimization have been studied in this research. The Taguchi analysis methodology is also applied during manufacturing process to c...

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Bibliographic Details
Main Authors: Yen Jyh-Chyang, 顏至強
Other Authors: 劉道恕
Format: Others
Language:zh-TW
Published: 2003
Online Access:http://ndltd.ncl.edu.tw/handle/38374972956174143615

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