微鎳電鑄單孔及多孔陣列模仁流場數值模擬分析
碩士 === 國防大學中正理工學院 === 兵器系統工程研究所 === 91 === In MEMS process, LIGA plays an important role to make high aspect ratio by micro-construction system. No matter micro-sensor, bio-chip or optic communication system, micro-channel array always play an important role. Further discussion on mass tr...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2003
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| Online Access: | http://ndltd.ncl.edu.tw/handle/69658752259586217083 |