ICP深蝕刻之表面效應對微流量感測器影響之研究
碩士 === 國防大學中正理工學院 === 造船工程研究所 === 91 === In the present study, it includes two methods of flow velocity measurement. One is extremely low velocity flow and another is higher. It is using the buoyancy effect to measure the extremely low velocity flow which the range of velocity flow is fro...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2003
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| Online Access: | http://ndltd.ncl.edu.tw/handle/78757115924172400203 |