preparations of novel polycyclosiloxanes and their applications in deep U.V. photoresist
碩士 === 國立中正大學 === 化學工程研究所 === 91 === Abstract It’s been well known that substrates containing carbon-fluoride or silicon-oxygen bonds can substantially enhance the radiation transmittance in deep U.V. light sources. Because of the high price in the organic fluoride compounds, we wish to d...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2003
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| Online Access: | http://ndltd.ncl.edu.tw/handle/09842529348579786491 |