Application of wafer map analysis for yield learning
碩士 === 中華大學 === 電機工程學系碩士班 === 91 === The semiconductor manufacturing process continues to become increasingly complex. The wafer fab technique plays an important role in the semiconductor manufacturing. In this thesis, we present the study results of the wafer map analysis that impact on the yield o...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2003
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| Online Access: | http://ndltd.ncl.edu.tw/handle/71868875084522519399 |