Studies of CNTs grown on Si substrate by thermal CVD
碩士 === 中原大學 === 應用物理研究所 === 91 === Abstract Growth and characteristics of carbon nanotubes (CNTs) on Ni-sputtered substrates Via the pyrolysis of methane by thermal CVD are studied in this thesis. The growth of CNTs was conducted with and without the introduction of NH3. Pure silicon and 200nm-Si3N4...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2003
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| Online Access: | http://ndltd.ncl.edu.tw/handle/4pmgzk |