Path planning of robot manipulators of cluster tools
碩士 === 大葉大學 === 機械工程學系碩士班 === 91 === In the semiconductor processes, the requirements of the working conditions of the environment are very critical, especially in the first-end processes. The production processes of a wafer must be in the clean room or in the vacuum chambers. In order to lower the...
| Main Author: | |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2003
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/84490583000804000392 |