Fabrication of Dielectric Passivation Layers for Metallic Films and IC Top Interconnections by Electrophoretic Deposition of Nanosized Glass Powders
碩士 === 逢甲大學 === 材料科學所 === 91 === The electrophoretic deposition (EPD) technique has been used as a simple but effective way to produce thin ceramic layers onto the electrically conductive substrates. This study is aimed to employ EPD method in engineering aspects of microelectronic and microelectrom...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2003
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| Online Access: | http://ndltd.ncl.edu.tw/handle/usuze9 |