Fabrication and Performace of PZT Thin Films Actuated Micro Cantilever-Beam
碩士 === 逢甲大學 === 機械工程學所 === 91 === Abstract Among all piezoelectric materials,（PZT（Pb(ZrxTi1-x)O3））has better piezoelectric performance, and combines easily with the development of micromachining. So it is broadly used in the design of sensors and actuators in Micro-Electron-Mechanical-System（MEMS...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2003
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/27620405342600983099 |