Fabrication and Performace of PZT Thin Films Actuated Micro Cantilever-Beam
碩士 === 逢甲大學 === 機械工程學所 === 91 === Abstract Among all piezoelectric materials,(PZT(Pb(ZrxTi1-x)O3))has better piezoelectric performance, and combines easily with the development of micromachining. So it is broadly used in the design of sensors and actuators in Micro-Electron-Mechanical-System(MEMS...
Main Authors: | Chuan-Yu Shao, 邵川煜 |
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Other Authors: | C-K Liu |
Format: | Others |
Language: | zh-TW |
Published: |
2003
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Online Access: | http://ndltd.ncl.edu.tw/handle/27620405342600983099 |
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