The study of laser induced amorphous silicon thin films crystallization
碩士 === 國立中興大學 === 材料工程學研究所 === 91 === ABSTRACT The poly-si films have been employed in fabrication of TFT-LCD to improve the electronic property of amorphous silicon. The large size grain boundaries and less lattice defects in poly-silicon films remarkably up grade the TFT characteristics...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2003
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| Online Access: | http://ndltd.ncl.edu.tw/handle/14374732068202588705 |