Measurement of Micromechanical Properties of Poly-Silicon and Silicon-Nitride Composite Thin-Film
碩士 === 國立中興大學 === 機械工程學系 === 91 === The composite thin-film structure, instead of the single layer thin film, is studied in this paper. Measurements of the mechanical properties of the composite thin-film are presented. The composite thin-film made of Poly-silicon and Silicon-nitride is used. The me...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2003
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| Online Access: | http://ndltd.ncl.edu.tw/handle/77897075549319415396 |