The Research of Fabrication and Reliability Testing in Digital Micromirror Device
碩士 === 國立中興大學 === 精密工程研究所 === 91 === In this research a novel digital micro-mirror device (DMD) with the T-shape hinge is developed. The simulation tool -Intellisuite, is employed to design the device, and also to study the effect of structure size and physics characteristic on the micro-...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2003
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| Online Access: | http://ndltd.ncl.edu.tw/handle/93507355347818038379 |