多晶矽微電熱式致動器之運動特性探討及其應用於可調變光衰減器之研究
碩士 === 國立中興大學 === 精密工程研究所 === 91 === Microactuators of different actuation mechanisms, such as electrostatic, electromagnetic, piezoelectric and electrothermal, and so on, have been demonstrated by means of micromachining technology. Among them, surface micromachined electrothermal actuat...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2003
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| Online Access: | http://ndltd.ncl.edu.tw/handle/31492644056857817488 |