Design, Fabrication and Characterization of Semiconductor-Type Oxygen Gas Sensors

碩士 === 國立成功大學 === 工程科學系碩博士班 === 91 === The objective of the study is to design and develop a semiconductor-type oxygen gas sensor for a microscopic energy consumption measurement system, which will be used for monitoring of health condition of premature babies. The sensors are fabricated on silicon...

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Bibliographic Details
Main Authors: Mei-Hsing Chen, 陳美杏
Other Authors: G. B. Lee
Format: Others
Language:zh-TW
Published: 2003
Online Access:http://ndltd.ncl.edu.tw/handle/70415944614359811858