Investigation of Nanoscale Etching Process Using Molecular Dynamics Simulation
碩士 === 國立成功大學 === 工程科學系碩博士班 === 91 === The integrated circuit improve the huge electric equipment. The development of IC bring us the convenience life. Undoubtedly more and more tiny semiconductor device is the current trend. The etching process play an important role in semiconductor technology and...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2003
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| Online Access: | http://ndltd.ncl.edu.tw/handle/93874408453017506008 |