A Study on Development of a Common Lab for MEMS Research
碩士 === 國立成功大學 === 工學院工程管理專班 === 91 === It is essential that MEMS research must be conducted in a special laboratory, not in general building facility. Other than general laboratory engineering planning and construction management, MEMS laboratory shall be equipped with a clean room facility, a monit...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2003
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| Online Access: | http://ndltd.ncl.edu.tw/handle/66879544254082013479 |