Growth of One-Dimensional SiOx and TiO2 Nanostructures Using Chemical Vapor Deposition
碩士 === 國立成功大學 === 化學工程學系碩博士班 === 91 === The growth characteristics of one dimensional nc-Si/SiOx composite nanowires using SiCl4/H2 as well as oxygen absorbed on chamber wall in a hot-filament chemical vapor deposition reactor were investigated in this study. The composite nanowires were grown on va...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2003
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| Online Access: | http://ndltd.ncl.edu.tw/handle/44011566065347659092 |