The Characteristic Studies of Copper Films Deposited on Plastic Substrates by Magnetron RF Sputtering Techniques
碩士 === 國立成功大學 === 材料科學及工程學系碩博士班 === 91 === Polyimides(PIs) have recently captured an accelerated interest for use in microelectronic applications. This is attributed to the fact that polyimides offer high temperature stability, oxidation and high chemical resistance, low dielectric constant, and exc...
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| Format: | Others |
| Language: | zh-TW |
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2003
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| Online Access: | http://ndltd.ncl.edu.tw/handle/15168762303466559844 |