The Effects Of Local Light Distribution On Excimer Laser Micro-Machining
碩士 === 國立成功大學 === 機械工程學系碩博士班 === 91 === Modeling and experimental work on the ablation of microstructures with excimer laser is presented. The local distribution of the light flux over the fabricated structure is calculated for each pulse by using Fourier optics. The variation of ablation depth wi...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2003
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| Online Access: | http://ndltd.ncl.edu.tw/handle/34833806604675561603 |