A Study for Reclamation and Reuse of the Chemical Mechanical Polishing Wastewater in Semi-conductor Industry
碩士 === 國立成功大學 === 環境工程學系碩博士班 === 91 === Feasibility for treatment and reclamation of the Chemical Mechanical Polishing(CMP) wastewater by the Latin Square Design and Taguchi Method of experiment design were studied. The Jar tests of Ferric chloride and Dipolarization-induced Electro-coagulation proc...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2003
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/66413608069886361858 |