Fabrication and Characterization of High-Performance Low Temperature Polycrystalline Silicon Thin Film Transistors
博士 === 國立交通大學 === 電子工程系 === 91 === In this thesis, various techniques for fabricating high-performance low temperature polycrystalline silicon (LTPS) thin film transistors (TFTs) are studied, in which the maximum process temperature is between 450°C and 600°C. Many methods have been propo...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2002
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| Online Access: | http://ndltd.ncl.edu.tw/handle/51224007221555216066 |