Study of Deep Depletion Phenomena in SrTiO3 High-k Gate Oxide and Its Application on the Ferroelectric Memory
碩士 === 國立交通大學 === 電子工程系 === 91 === SrTiO3 thin films were deposited on p-type silicon substrate by radio-frequency (rf) magnetron sputtering in an Ar-O2 and Ar-N2 mixed ambient to form metal/insulator/semiconductor (MIS) structure. We found that the Schottky emission and Fowler-Nordheim t...
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| Format: | Others |
| Language: | en_US |
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2003
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| Online Access: | http://ndltd.ncl.edu.tw/handle/69878017558641376753 |