Mechanism Design on the Valves of a Vacuum Pump Used in Semiconductor Equipments
碩士 === 國立交通大學 === 機械工程系 === 91 === Vacuum valves play an important role on the vacuum components. The quality of vacuum valves influences the vacuum and the flow control of a vacuum system. However, in conventional industries, vacuum valves have been applied to many aspects.The technologies for the...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2003
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| Online Access: | http://ndltd.ncl.edu.tw/handle/23364545515877004508 |