Mechanism Design on the Valves of a Vacuum Pump Used in Semiconductor Equipments

• Main Authors: Chun-Chou Liu, 劉醇宙
• Other Authors: Chung-Biau Tsay
• Format: Others
• Language: zh-TW
• Published: 2003
• Online Access: http://ndltd.ncl.edu.tw/handle/23364545515877004508

碩士 === 國立交通大學 === 機械工程系 === 91 === Vacuum valves play an important role on the vacuum components. The quality of vacuum valves influences the vacuum and the flow control of a vacuum system. However, in conventional industries, vacuum valves have been applied to many aspects.The technologies for the flow control and the piping placement reach maturity. However, the design requirements of vacuum valves used in semiconductor industries are stricter than those of used in conventional industries. The materials used in semiconductor process mostly are poisonous, corrosive, inflammable and explosive. Therefore, it is really a challenge to design vacuum valves used in semiconductor industries, which meet with the severe operational conditions such as cleanness, durability, hermetic seal and replacement. The aim of this study is to design a new-type of vacuum valves for vacuum pumps used in semiconductor equipments according to the following steps: (1) collecting references by searching and analyzing patents, (2) defining the functions of sub-system in vacuum valves, (3) verifying design requirements, and (4) making conceptual design.