Design and Implementation on Cluster Tool Transfer Module Controller and SECS Communication Module
碩士 === 國立交通大學 === 機械工程系 === 91 === This thesis focuses on how to use Object Oriented Analysis and Design (OOAD) to design cluster tool transfer module controller (TMC) and SECS communication module conforming to the SEMI standard. By using the developed SECS communication module, TMC has...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2003
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| Online Access: | http://ndltd.ncl.edu.tw/handle/84795977160191248062 |