Design and Implementation on Cluster Tool Transfer Module Controller and SECS Communication Module

• Main Authors: Yen-Hui Li, 李妍慧
• Other Authors: Ann-Chan Li
• Format: Others
• Language: zh-TW
• Published: 2003
• Online Access: http://ndltd.ncl.edu.tw/handle/84795977160191248062

碩士 === 國立交通大學 === 機械工程系 === 91 === This thesis focuses on how to use Object Oriented Analysis and Design (OOAD) to design cluster tool transfer module controller (TMC) and SECS communication module conforming to the SEMI standard. By using the developed SECS communication module, TMC has the capacity to communicate with cluster tool controller (CTC), front-end module controller (FEMC) and process module controller (PMC). Through RS232 Interface, TMC can drive the components of semiconductor equipment, instead of JNI interface, directly by Java communication API. TMC also has the ability to report events to CTC and to handle exceptions. Finally, CTC, TMC, FEMC and PMC can be hooked up all together to process and transfer wafers automatically. In the development of SECS communication module conforming to the SEMI-E5 SECS II and SEMI-E37 HSMS standard, we use Design Patterns, in particular component pattern and visitor pattern. The feature of this approach is the flexibility and reusability of the module. When the SECS communication module in on duty, the controllers, like TMC or CTC, have the ability to establish connection to other controllers and to send or receive SECS messages. The testing procedures are presented in the thesis as well as testing results