Hardware-in-the-loop TM and RTP Simulator Design and Implementation
碩士 === 國立交通大學 === 機械工程系 === 91 === In this thesis, we will develop transfer module (TM) and rapid thermal processing (RTP) simulators in order to verify the performance of transfer module controller (TMC) and RTP controller by using the concept of Hardware-in-the-loop (HIL). The design and implement...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2003
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| Online Access: | http://ndltd.ncl.edu.tw/handle/74684406922147831103 |