Hardware-in-the-loop TM and RTP Simulator Design and Implementation
碩士 === 國立交通大學 === 機械工程系 === 91 === In this thesis, we will develop transfer module (TM) and rapid thermal processing (RTP) simulators in order to verify the performance of transfer module controller (TMC) and RTP controller by using the concept of Hardware-in-the-loop (HIL). The design and implement...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2003
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| Online Access: | http://ndltd.ncl.edu.tw/handle/74684406922147831103 |
| Summary: | 碩士 === 國立交通大學 === 機械工程系 === 91 === In this thesis, we will develop transfer module (TM) and rapid thermal processing (RTP) simulators in order to verify the performance of transfer module controller (TMC) and RTP controller by using the concept of Hardware-in-the-loop (HIL). The design and implementation issues will be discussed to make the simulator more extendable and modularized.
MATLAB , which has powerful tool boxes for real-time simulation and model construction, is adopted as a developing tool for the simulator. In addition, neural network approach is used to model the wafer heating processing. Then it is integrated into the simulator to verify the RTP controller. The testing procedures as well as testing results are presented in the thesis.
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