Research and Discussion of Porous Low-k SiOC

Research and Discussion of Porous Low-k SiOC

碩士 === 國立交通大學 === 應用化學系 === 91 ===

Bibliographic Details
Main Authors:	Chen Yin-chuan, 陳尹川
Other Authors:	Loong Wen-an
Format:	Others
Language:	zh-TW
Published:	2003
Online Access:	http://ndltd.ncl.edu.tw/handle/68721702174136980305

Internet

http://ndltd.ncl.edu.tw/handle/68721702174136980305

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