Design, Simulation, and Fabrication of Electrostatic Micropump Implemented by ICP High Aspect Ratio Etch
碩士 === 國立交通大學 === 電機與控制工程系 === 91 === An electrostatic actuated micropump is designed in the thesis for MEMS technology application. Main characteristic of micropump is control little fluid volume and pump liquid out, which is used in biological, chemical experiment, and medical equipment...
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| Format: | Others |
| Language: | en_US |
| Published: |
2003
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| Online Access: | http://ndltd.ncl.edu.tw/handle/80099654837709199399 |