Study of Carbon Nanotube Synthesized by MP-CVD
碩士 === 國立中央大學 === 機械工程研究所 === 91 === ABSTRACT In this study, high-density vertical carbon nanotubes were grown on Si substrate at 400℃ by microwave plasma chemical vapor deposition with Fe, Co, and Ni as catalyst. The characterization of the carbon nanotubes were carried out by SEM, TEM, AFM,...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2003
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| Online Access: | http://ndltd.ncl.edu.tw/handle/88414150526613351996 |