Fabrication of Fabry-Perot filters with MEMS technology

碩士 === 國立中央大學 === 光電科學研究所 === 91 === none

Bibliographic Details
Main Authors: Chang-Dau Sung, 商中道
Other Authors: Jenq-Yang Chang
Format: Others
Language:zh-TW
Published: 2003
Online Access:http://ndltd.ncl.edu.tw/handle/81076638961769708233