The Study of Temperature Compensation with SiO2 Films on Proton-Exchanged LiNbO3 and LiTaO3 for Surface Acoustic Wave
碩士 === 國立中山大學 === 電機工程學系研究所 === 91 === In this study, proton-exchanged (PE) waveguides in Z-cut LiNbO3 and 36°-Y LiTaO3 have been fabricated using octanoic acid. The XRD analysis shows that the proton-exchange mechanism is different for LiNbO3 and LiTaO3 substrate, which results in a different varia...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2003
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| Online Access: | http://ndltd.ncl.edu.tw/handle/03999492624980948034 |