Atomic Structure Evolution and the Mechanism for Nickel Induced Lateral Crystallization of Amorphous Silicon
碩士 === 國立清華大學 === 材料科學工程學系 === 91 === Recently, there are extensive studies on the fabrication of high quality and low process temperature polycrystalline silicon thin film by the nickel metal induced lateral crystallization (Ni-MILC) method. Our previous works indicated that, changing th...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2003
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| Online Access: | http://ndltd.ncl.edu.tw/handle/08866636869267800600 |