Design and Fabrication of PECVD SiOxNy Array Waveguide Grating
碩士 === 國立清華大學 === 電子工程研究所 === 91 ===
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2003
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| Online Access: | http://ndltd.ncl.edu.tw/handle/84701740135536890177 |