Electrical Analysis Simulation and Fabrication of RF MEMS Switches
碩士 === 國立清華大學 === 電子工程研究所 === 91 === In this study, we investigated the electrical analysis simulation and fabrication of RF MEMS(Micro Electromechanical System) switches. Except that the theoretical S-parameter has been derived, we also used Ansoft HFSS to simulate and analyze these devi...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2003
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| Online Access: | http://ndltd.ncl.edu.tw/handle/64832224619924326648 |