Fabrication and Characterization of Metal/Insulator Tunnel Transistors

碩士 === 國立清華大學 === 電子工程研究所 === 91 === Abstract A metal/insulator tunnel transistor (MITT) that operates by controlling the current flowing through a tunnel insulator has been fabricated. The NbOx incidate large is about 40nm wide. Although it hard to define the precise insulator...

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Bibliographic Details
Main Authors: Kwang-Cheng Tai, 戴光成
Other Authors: 李雅明
Format: Others
Language:zh-TW
Published: 2003
Online Access:http://ndltd.ncl.edu.tw/handle/10763557067374208052