Fabrication and Characterization of Metal/Insulator Tunnel Transistors
碩士 === 國立清華大學 === 電子工程研究所 === 91 === Abstract A metal/insulator tunnel transistor (MITT) that operates by controlling the current flowing through a tunnel insulator has been fabricated. The NbOx incidate large is about 40nm wide. Although it hard to define the precise insulator...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2003
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Online Access: | http://ndltd.ncl.edu.tw/handle/10763557067374208052 |