Fabrication of Microchannels Using Thick Photoresist as Sacrificial Layers with SU-8 as Channel Structures
碩士 === 國立海洋大學 === 系統工程暨造船學系 === 91 === The study applies micro-electro-mechanical-system technology to fabricate microchannel biomedical chip. We expect this framework is an attempt to combine the capabilities such as sample loading, drop metering, thermal reaction, separate and photodetectors to a...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2003
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| Online Access: | http://ndltd.ncl.edu.tw/handle/60598973989624987748 |