Microfabrication of Capacitive Ultrasonic Transducers
碩士 === 國立海洋大學 === 系統工程暨造船學系 === 91 === The main focus of the study is to implement the design and microfabrication for phased-array ultrasonic transducers using MEMS technology. The capacitive ultrasonic transducers (cMUTs) combining CMOS process technology is the potential renovation in high tech a...
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| Format: | Others |
| Language: | zh-TW |
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2003
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| Online Access: | http://ndltd.ncl.edu.tw/handle/32303273283066841401 |