Illumination Effect on The Characteristics of MOS Capacitors with Non-uniform Substrate Doping
碩士 === 國立臺灣大學 === 電子工程學研究所 === 91 === The monitoring of the electrical properties of devices in integrated circuit is strong needed as the MOSFET dimension shrinks continuously. The illumination effect on the characteristics of MOS capacitors with non-uniform substrate doping is studied in this thes...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2003
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| Online Access: | http://ndltd.ncl.edu.tw/handle/13127339042053352957 |