Design and Construction of an Innovative Multifunctional Microscopy System
博士 === 國立臺灣大學 === 機械工程學研究所 === 91 === Since probe of contact type surface profiler can damage the sample surface easily and the geometric size of the probe is another limitation, it is difficult to be widely used in ultra-high precision surface measurement. This is the underlying reason that non-co...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2003
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/84669507298950640159 |