A Study of Process Exhaust System for TFT-LCD Factory
碩士 === 國立臺灣大學 === 機械工程學研究所 === 91 === This thesis focuses on the simulation of process exhaust system, the outcome of which was verified by the process of numerical simulations and experiments. First, a experiment was done to examine the performance of flow control valve in order to build...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2003
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| Online Access: | http://ndltd.ncl.edu.tw/handle/05801438759277700150 |