A Study of Process Exhaust System for TFT-LCD Factory

• Main Author: 劉啟熾
• Other Authors: 陳希立
• Format: Others
• Language: zh-TW
• Published: 2003
• Online Access: http://ndltd.ncl.edu.tw/handle/05801438759277700150

碩士 === 國立臺灣大學 === 機械工程學研究所 === 91 === This thesis focuses on the simulation of process exhaust system, the outcome of which was verified by the process of numerical simulations and experiments. First, a experiment was done to examine the performance of flow control valve in order to build the lose coefficient of different diameter of duct. Then a simulation software was used to verify the duct components Finally, the outcomes were extended to the simulations and analyses of large process exhaust system. As to experiments, this thesis abided by the international standard criteria of SMACNA and ASHRAE to plan and establish the measurement equipments of duct component and duct system in order to assure the reliability of outcomes. As to numerical simulations, this thesis used duct simulation software to proceed the verification of the outcomes of Flow Control Valve, the simulation of duct system and the analysis of the TFT-LCD factories. During the process of flow control valve performance experiments, this thesis compared the lose coefficient influenced by different diameter of duct and degree of flow control valve, then found that the lose coefficient of flow control valve would increase when the diameter increases, and decrease when the degree increases. At last, a small type of duct system was established to proceed experiments and measurements. As to the simulations and analyses of duct, first the simulation focused on flow control valve was done, and a database of lose coefficient of flow control valve was built by the outcomes of experiments. This thesis proceeded the simulation focused on the small type of dust system, then discussed and analyzed the outcomes of simulations and experiments. Finally, the thesis proceeded simulations aimed at the process exhaust system of one TFT-LCD factory that was fully designed was done, and discussed the suggested degree of flow control valve, which should be adjusted in order to achieve the balance of flow rates of each duct section and pressure lose