Coupled-domain Nonlinear Macromodeling for MEMS

碩士 === 國立臺灣大學 === 機械工程學研究所 === 91 === System-level simulations of MEMS devices are essential for dynamic performance prediction and optimization. One of the key requirements for such simulations is the development of efficient and accurate macromodels that are compatible with system-level...

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Bibliographic Details
Main Authors: Cheng, Szu-Yuan, 曾思遠
Other Authors: Yang, Yao-Joe
Format: Others
Language:zh-TW
Published: 2003
Online Access:http://ndltd.ncl.edu.tw/handle/80579689020226247418