Identification of Thin-Film Mechanical Properties by Inverse Methods
博士 === 國立臺灣大學 === 應用力學研究所 === 91 === In the manufacturing process of semiconductor and MEMS, the yielding is affected considerably not only by the mechanical properties but also the stress distribution of thin films. For these two factors, a series of global domain, high-resolution and real-time opt...
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| Format: | Others |
| Language: | zh-TW |
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2002
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| Online Access: | http://ndltd.ncl.edu.tw/handle/53938440328345693349 |